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SolidSpec 3700-3700DUV

Shimadzu has released the SolidSpec-3700/3700DUV series, their top-of-the-line UV-VIS-NIR spectrophotometers. The SolidSpec-3700DUV incorporates the ability for deep UV measurements down to 165 nm with N2 gas purging.

The SolidSpec-3700/3700DUV series was developed to satisfy the needs of the electronics and optics markets. These systems also satisfy the latest technological advances. For example, they are capable of measuring the full-area of 12-inch wafers, evaluating the near infrared reflectance of anti-reflective coatings used on optical communications-related devices, and evaluating optical materials in the deep UV region that are needed because of shorter wavelengths being used for irradiation lasers used in exposure systems for semiconductor production.


New Technology

The SolidSpec features the newest technology in UV/VIS/NIR spectrophotometers:

World's first UV-VIS-NIR spectrophotometer incorporating three detectors to achieve high sensitivity

The SolidSpec-3700/3700DUV Series are the world's first UV-VIS-NIR spectrophotometers incorporating three detectors. A photomultiplier is used for the UV-VIS region, and an InGaAs detector and cooled PbS detector are used for the NIR region. The photomultiplier and PbS detectors lose sensitivity in the 850 to 1600 nm wavelength range, but the SolidSpec-3700/3700DUV series includes an InGaAs detector that is highly sensitive in that region. Therefore, these systems are able to achieve highly sensitive measurements over the entire NIR range.

Extremely high sensitivity and low stray light levels

By using a photomultiplier and D2 lamp with a fused quartz window, and an integrating sphere with inner walls of special polymer that is highly reflective up through the DUV range, the SolidSpec-3700DUV is capable of measurements throughout the 175 to 2600 nm range, even when using the integrating sphere. If the optional direct DUV detection unit is installed, the system is capable of measurements over the 165 to 3300 nm range. This 165 to 3300 nm range is the widest for a UV-VIS-NIR spectrophotometer currently available in the market.

An extra-large sample compartment allows a wide variety of samples to be tested

With an innovative three-dimensional optical system (patent pending) and a large sample compartment intended for non-destructive testing, large samples up to 700 x 560 mm can be measured. In addition, an automatic X-Y stage (optional) allows high-throughput measurements.

Ideal For Multiple Industries

The SolidSpec's high sensitivity and large-sample compartment make it the ideal instrument for multiple industries:

Flat Panel Display (FPD)-related Industries
In FPD-related industries, large-sample compartments are important for non-destructive measurements of increasingly larger FPD materials. High sensitivity in the NIR region is also important for evaluating the characteristics of FPD materials.

Semiconductor-related Industries
The SolidSpec will give you measurements in the DUV range, which are required for evaluating optical materials, because increasingly shorter wavelengths are used for irradiation lasers in exposure systems for semiconductor production. Large-sample compartments are also important for full-area measurement of 12-inch wafers.

Optical Communications-related Industries
High sensitivity in the NIR region, which the SolidSpec provides, is important for evaluating anti-reflective coatings for their low transmittance in the NIR region (1300 to 1500 nm range).

Optical Materials-related Industries
In these industries, where accurate measurements of optical characteristics are required over the DUV to NIR range, high sensitivity over the DUV to NIR range is important. The SolidSpec gives you that sensitivity. Large-sample compartments are also important for non-destructive testing of optical materials.

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